BONDING OF STRUCTURES TOGETHER INCLUDING, BUT NOT LIMITED TO, BONDING A SEMICONDUCTOR WAFER TO A CARRIER

United States of America Patent

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Issued Date
Dec 11, 2008
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Jun 7, 2007
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Jun 7, 2007

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Abstract

An expandable membrane (280), e.g. a membrane that is elastic and/or has a corrugated edge, is expanded to exert more uniform pressure over a semiconductor wafer (110) or a carrier (254) to bond the wafer to the carrier.

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TRU-SI TECHNOLOGIES INC	657 N PASTORIA AVENUE SUNNYVALE CA 94085

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Inventor Name	Address	# of filed Patents	Total Citations
Berger, Alexander J	Palo Alto, CA	15	204
Savastiouk, Sergey	San Jose, CA	36	2666

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BONDING OF STRUCTURES TOGETHER INCLUDING, BUT NOT LIMITED TO, BONDING A SEMICONDUCTOR WAFER TO A CARRIER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11759652

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11759652

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