System, method and apparatus for maintaining separation of liquids in a controlled meniscus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8141566
APP PUB NO 20080314422A1
SERIAL NO

11820590

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Abstract

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A system and method of forming and using a proximity head. The proximity head includes a head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and multiple first discrete holes connected to a corresponding first conduit and arranged in a first row. The second zone including a second flat region and multiple second discrete holes connected to a corresponding second conduit. The inner return zone being disposed between and adjacent to the first zone and the second zone and including multiple inner return discrete hole connected to a corresponding inner return conduit and arranged in an inner return row. The first row and the inner return row are parallel. A portion of an edge of each of the inner return discrete holes is recessed into the head surface.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kholodenko, Arnold San Francisco, US 61 2451
Lin, Cheng-Yu (Sean) Mountain View, US 13 48
O'Donnell, Robert Fremont, US 23 274

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