Mirror and mirror layer for optical modulator and method

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United States of America Patent

PATENT NO 8226836
APP PUB NO 20080314866A1
SERIAL NO

12190520

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Abstract

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Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.

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Patent Owner(s)

  • SNAPTRACK, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, US 259 8761
Sampsell, Jeffrey B Pueblo West, US 165 16281

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