THIN FILM TRANSISTORS AND FABRICATION METHODS
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United States of America Patent
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Sep 9, 2008
filing date -
Jul 8, 2002
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Abstract
A method of fabricating a low temperature semiconductor thin film device is described. The method includes: forming one or more metal lines on a substrate; forming a conductive contact to a said metal line; forming a thin film device having: a first amorphous silicon region, wherein a portion of the region covers a said conductive contact; and a gate dielectric layer; and a second amorphous silicon layer; forming a silicide of first and second amorphous silicon material with a deposited metallic material; depositing an insulating material; and forming conductive contacts and top metal interconnects to couple said first and second amorphous silicon regions.
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