TREATMENT METHOD AND SOIL TREATMENT METHOD
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United States of America Patent
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app pub date -
Apr 9, 2008
filing date -
May 13, 1998
priority date (Note) -
Abandoned
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Abstract
A treatment method includes heating a treatment target object under reduced pressure in a hermetic zone to vaporize a component of the treatment target object, and opening a hermetic door and inserting a tube from a side of a treatment system for the vaporized component adjoining the hermetic zone with the hermetic door therebetween such that the tube shields the hermetic door from the hermetic zone to introduce the component vaporized from the treatment target object to the treatment system side.
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