DEVICE AND METHOD FOR COMPENSATING A CAPACITIVE SENSOR MEASUREMENT FOR VARIATIONS CAUSED BY ENVIRONMENTAL CONDITIONS IN A SEMICONDUCTOR PROCESSING ENVIRONMENT
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United States of America Patent
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Issued Date -
Jan 15, 2009
app pub date -
Jul 9, 2008
filing date -
Jul 13, 2007
priority date (Note) -
Abandoned
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Abstract
A method of sensing proximity to a showerhead in a semiconductor-processing system is provided. The method includes measuring a parameter that varies with proximity to the showerhead, as well as with at least one external factor. The method also includes measuring a parameter that does not vary with proximity to the showerhead, but does vary with the at least one factor. A compensated proximity output is calculated based upon the measured parameters and is provided as an output.
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