DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTICAL CD MEASUREMENT SYSTEM
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United States of America Patent
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Issued Date -
Jan 15, 2009
app pub date -
May 27, 2008
filing date -
Jul 11, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and a device are disclosed, with which an improvement of the measurement accuracy for the determination of structure data is possible. There is provided a device having a support table (4) movable in the X-coordinate direction and the Y-coordinate direction, on which an additional holder (6) for holding a substrate (2) is carried, having at least one light source (16; 20), at least one objective (8) and a first detector unit (15a) receiving the light transmitted or reflected by structures applied to the substrate (2). There is further provided a polarization means (30a; 30b) associated with the light source (16; 20) and/or located in an optical imaging path (10; 12).
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