Imprint apparatus and imprint method using the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090025588A1
SERIAL NO

12156773

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Abstract

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The present invention relates to an imprint apparatus for forming a transfer pattern on a substrate. The imprint apparatus includes a container comprising a pattern forming material and a mold member comprising an imprint pattern formed on a surface.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Jang-kyum Seoul, KR 12 51
Park, Dae-jin Incheon, KR 36 253

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