Plasma-resistant ceramics with controlled electrical resistivity

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United States of America Patent

PATENT NO 8367227
APP PUB NO 20090036292A1
SERIAL NO

11890156

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Abstract

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Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Collins, Kenneth S San Jose, US 308 50132
Duan, Ren-Guan San Jose, US 70 11340
Graves, Thomas Los Altos, US 8 4300
He, Xiaoming Arcadia, US 45 3980
Sun, Jennifer Y Sunnyvale, US 254 22744
Thach, Senh Union City, US 47 8880
Yuan, Jie San Jose, US 90 8122

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