Importance

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Abstract

Provided is a vibration control mass body, as a mass body used for controlling with a high accuracy a vibration associated with high-speed movement of a movable body such as a stage, which is large-sized and to which a complicated shape can be imparted. The vibration control mass body (100) includes a plurality of platy members (10, 20). The plurality of members (10, 20) are respectively made of a tungsten alloy. The tungsten alloy contains, as a chief ingredient, tungsten of greater than or equal to 80% by mass and less than or equal to 99% by mass. The vibration control mass body (100) is used in a staging unit having a movable body in order to control a vibration associated with movement of the movable body.

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First Claim