Contamination barrier and lithographic apparatus comprising same
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United States of America Patent
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app pub date -
Oct 14, 2008
filing date -
Mar 29, 2006
priority date (Note) -
Abandoned
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Abstract
A rotatable contamination barrier is disclosed that has a plurality of closely packed blades configured to trap contaminant material coming from a radiation source. The blades are radially oriented relative to a central rotation axis of the contamination barrier. The blades comprise a metal compound having crystals oriented generally radially relative to the central rotation axis.
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