SYSTEM AND METHOD FOR MEASURING ADHESION FORCES IN MEMS DEVICES
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United States of America Patent
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Issued Date -
Feb 26, 2009
app pub date -
Aug 21, 2007
filing date -
Aug 21, 2007
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Abandoned
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Abstract
A MEMS test device comprises a flexible beam spaced apart from an optical stack. The MEMS test device includes a reflective layer and a partially reflective layer, such that a change in the position of the MEMS test device can be observed without the use of an external interferometer. The flexible beam may be cantilevered or fixed at each end. The flexible beam may include a shoe suspended from the side of the beam facing the optical stack, to provide a fixed contact area. An array of MEMS test devices may be used to determine compliance, or to calculate adhesion forces.
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