Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7767506
APP PUB NO 20090053863A1
SERIAL NO

12258228

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Abstract

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An exposure mask is provided, which includes: a light blocking opaque area blocking incident light; a translucent area; and a transparent area passing the most of incident light, wherein the translucent area generates the phase differences in the range of about −70° to about +70°.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SAMSUNG DISPLAY CO., LTD.SUWON-SI GYEONGGI-DO14030

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Ji-Haeng Gunpo-si, KR 3 6
Jung, Bae-Hyoun Seongnam-si, KR 7 16
Jung, Young-Bae Suwon-si, KR 49 296
Kim, Jong-An Suwon-si, KR 14 61

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NIKON CORPORATION (1)
* 2002/0145,711 EXPOSURE APPARATUS, APPARATUS FOR MANUFACTURING DEVICES, AND METHOD OF MANUFACTURING EXPOSURE APPARATUSES 44 2000
 
MITSUBISHI ELECTRIC CORPORATION (1)
5916712 Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same 10 1998
 
SHELL OIL COMPANY (1)
* 6217422 Light energy cleaning of polishing pads 18 1999
 
LG DISPLAY CO., LTD. (1)
2007/0064,185 Transflective liquid crystal display device having color filter-on-thin film transistor (COT) structure and method of fabricating the same 6 2006
 
KABUSHIKI KAISHA TOSHIBA (1)
* 5543252 Method for manufacturing exposure mask and the exposure mask 8 1994
 
Shipley Company, L.L.C. (1)
6300035 Chemically amplified positive photoresists 16 1998
 
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. (1)
* 5902493 Method for forming micro patterns of semiconductor devices 6 1996
 
DAI NIPPON PRINTING CO., LTD. (1)
6869736 Halftone phase shift photomask and blank for halftone phase shift photomask 8 2003
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Semiconductor Energy Laboratory Co., Ltd. (2)
9041202 Semiconductor device and manufacturing method of the same 3 2009
9397255 Semiconductor device and manufacturing method of the same 1 2014
* Cited By Examiner

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