US Patent Application No: 2009/0053,863

Number of patents in Portfolio can not be more than 2000

Mask and Manufacturing Method of a Semiconductor Device and a Thin Film Transistor Array Panel Using the Mask

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Abstract

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An exposure mask is provided, which includes: a light blocking opaque area blocking incident light; a translucent area; and a transparent area passing the most of incident light, wherein the translucent area generates the phase differences in the range of about −70° to about +70°.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SAMSUNG DISPLAY CO., LTD.SUWON-SI GYEONGGI-DO11184

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Ji-Haeng Gunpo-si , KR 3 3
Jung, Bae-Hyoun Seongnam-si , KR 7 12
Jung, Young-Bae Suwon-si , KR 49 206
KIM, Jong-An Suwon-si , KR 14 51

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Patent Info (Count) # Cites Year
 
NIKON CORPORATION (1)
* 2002/0145,711 EXPOSURE APPARATUS, APPARATUS FOR MANUFACTURING DEVICES, AND METHOD OF MANUFACTURING EXPOSURE APPARATUSES 36 2000
 
MITSUBISHI ELECTRIC CORPORATION (1)
* 5,916,712 Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same 10 1998
 
SHELL OIL COMPANY (1)
* 6,217,422 Light energy cleaning of polishing pads 16 1999
 
KABUSHIKI KAISHA TOSHIBA (1)
* 5,543,252 Method for manufacturing exposure mask and the exposure mask 8 1994
 
LG DISPLAY CO., LTD. (3)
* 2002/0044,229 Thin film transistor liquid crystal display and method of fabricating the same 0 2001
* 2004/0266,041 Method of fabricating array substrate having color filter on thin film transistor structure 0 2004
* 2007/0064,185 Transflective liquid crystal display device having color filter-on-thin film transistor (COT) structure and method of fabricating the same 5 2006
 
Shipley Company, L.L.C. (1)
* 6,300,035 Chemically amplified positive photoresists 15 1998
 
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. (1)
* 5,902,493 Method for forming micro patterns of semiconductor devices 6 1996
 
DAI NIPPON PRINTING CO., LTD. (1)
* 6,869,736 Halftone phase shift photomask and blank for halftone phase shift photomask 7 2003
* Cited By Examiner

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