Electroplating cell and tool

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United States of America Patent

PATENT NO 9611561
APP PUB NO 20090065363A1
SERIAL NO

11852707

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electroplating cell employable with an electroplating tool and method of operating the same. In one embodiment, the electroplating cell includes a cover configured to substantially seal the electroplating cell to an outside atmosphere during an electroplating process, and a porous tube couplable to an inert gas source configured to bubble an inert gas through an electrolyte containable therein. The electroplating cell also includes an anode, encased in an envelope of a semipermeable membrane, formed with an alloy of electroplating material, and a magnet configured to orient an axis of magnetization of the electroplating material for application to a wafer couplable thereto during an electroplating process.

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Patent Owner(s)

Patent OwnerAddress
ALTERA CORPORATION101 INNOVATION DRIVE SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Filas, Robert W Basking Ridge, US 28 764
Liakopoulos, Trifon M Bridgewater, US 22 849
Panda, Amrit San Jose, US 22 472

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