
US Patent Application No: 2009/0065,775
Number of patents in Portfolio can not be more than 2000
TEST-KEY FOR CHECKING INTERCONNECT AND CORRESPONDING CHECKING METHOD
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Mar 12, 2009
Publication date -
Nov 18, 2008
filing date -
12/273,515
serial no -
Granted
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Abstract
A test key for checking an interconnect structure is described, including a contiguous metal line and multiple conductive plugs on the contiguous metal line, wherein one end of each plug contacts with the contiguous metal line. The other end of at least one plug is not connected to any conductor. In addition, the two ends of the contiguous metal line are connected to different voltages.
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