TRANSPORT SYSTEM WITH BUFFERING
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United States of America Patent
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N/A
Issued Date -
Mar 12, 2009
app pub date -
Sep 5, 2008
filing date -
Sep 6, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A workflow cell for a fabrication facility is provided. The workflow cell includes a semiconductor processing tool and a buffering station holding Front Opening Unified Pods (FOUPs) proximate to the semiconductor processing tool. The buffering station receives the FOUPs from a main stocker of the fabrication facility. The buffering station is configured to store a portion of the FOUPs in the main stocker. The workflow cell also includes a conveying mechanism connecting the semiconductor processing tool and the buffering station. In one embodiment, the conveying mechanism is the Direct Tool Load mechanism. A fabrication facility having the workflow and a method for moving a transport container are also provided.
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