Importance

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Abstract

A method for preparing a poled structure by using double-sided electrodes to perform a poling process first provides a ferroelectric substrate with a first polarization direction having a top surface and a bottom surface. Fabrication processes are then performed to form an electrode structure including a first electrode and a second electrode on the top surface and a third electrode in a portion of the bottom surface between the first electrode and the second electrode. Subsequently, a poling process is performed on the electrode structure to form a plurality of inverted domains having a second polarization direction in the ferroelectric substrate, and the second polarization direction is substantially opposite to the first polarization direction.

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First Claim