Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
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United States of America Patent
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Feb 28, 2012
Grant Date -
Mar 26, 2009
app pub date -
Sep 19, 2008
filing date -
Sep 20, 2007
priority date (Note) -
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Abstract
Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
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