END EFFECTOR WITH SENSING CAPABILITIES
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United States of America Patent
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N/A
Issued Date -
Apr 9, 2009
app pub date -
Oct 2, 2008
filing date -
Oct 3, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
In one embodiment, an end effector having a first arm extending from an end effector support body, and a second arm extending from the end effector support body is provided. The first arm and the second arm have support extensions for supporting a peripheral region of a substrate, wherein the second arm and the first arm include sensors integrated thereon. The sensors are located at a distal end of the first and the second arms past the corresponding support extensions. The sensors are configured to indicate whether support arms for a container are within the travel path of the end effector in one embodiment. The end effector may be integrated into a system for transporting substrates.
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