METHOD FOR FORMING FILM AND FILM FORMING SYSTEM

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United States of America Patent

APP PUB NO 20090092741A1
SERIAL NO

11908650

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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to evaporate. An object of this invention is to generate a thin film of high grade having less impure substances.

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Patent Owner(s)

Patent OwnerAddress
HORIBA LTDKYOTO 601-8510
THE DOSHISHAKYOTO 602-8580
HORIBA STEC CO LTD11-5 HOKOTATE-CHO KAMITOBA MINAMI-KU KYOTO-SHI KYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishida, Kozo Kyoto, JP 41 403
Komeda, Akiko Kyoto , JP 3 6
Matsuda, Koichiro Kyoto, JP 8 21
Oshima, Motohiro Kyoto, JP 3 7
Senda, Jiro Kyoto , JP 7 33
Shimizu, Tetsuo Kyoto , JP 204 2451
Tominaga, Koji Kyoto , JP 30 192

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