Seal Material for Semiconductor Production Apparatus
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United States of America Patent
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Issued Date -
Apr 9, 2009
app pub date -
Feb 7, 2006
filing date -
Feb 15, 2005
priority date (Note) -
Abandoned
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Abstract
A sealing material for a semiconductor manufacturing apparatus includes as rubber components, 80 to 50% by weight of a tetrafluoroethylene-perfluoroalkylvinylether type perfluoro elastomer (FFKM) and 20 to 50% by weight of a fluoroelastomer (FKM) other than FFKM (where FFKM+FKM=100% by weight).
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