WIRELESS ILLUMINATION SENSING ASSEMBLY
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United States of America Patent
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Issued Date -
Apr 23, 2009
app pub date -
Oct 14, 2008
filing date -
Oct 22, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A wireless illumination sensing assembly for sensing a property of illumination within a semiconductor processing environment is provided. The sensing assembly has a power source and a wireless communication module coupled to the power source. Measurement circuitry is also provided. At least one illumination sensor having an electrical characteristic that varies with the property of illumination. The illumination sensor(s) is/are coupled to the measurement circuitry.
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