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Abstract

A method is described to form a rewriteable memory cell including a diode and an oxide layer, wherein the resistivity of the oxide layer can be reversibly switched. In preferred embodiments, the oxide layer is a grown oxide. The diode is preferably formed of polysilicon which has been crystallized in contact with a silicide which has a close lattice match to silicon. The silicide provides a crystallization template such that the polysilicon is large-grained with few defects, and thus relatively low-resistivity. In preferred embodiments, a monolithic three dimensional memory array can be formed, in which multiple memory levels of such rewriteable memory cells are monolithically formed vertically stacked above a substrate.

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First Claim