Importance

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Abstract

A gas laser oscillator (1), which generates a laser beam by exciting laser gas in discharge tubes (7) with a laser power supply (4) and detecting an abnormality thereof, includes a storage unit (12) for storing the relationship between the output command and the DC current of the laser power supply (4) during the normal operation of the oscillator (1), an output command generating unit (13) for generating an output command corresponding to the peak current value in the relationship between the output command and the DC current, a current detection unit (19) for detecting the current during the operation of the laser power supply (4) based on the output command in the standby operation mode of the gas laser oscillator (1), and an abnormality judging unit (15) for judging that the discharge load of the gas laser oscillator (1) has an abnormality based on the detection current detected by the current detection unit (19) and the peak value of the current in the relationship between the output command and the DC current. In this way, the abnormality of the discharge load of the discharge tubes (7) can be easily and safely detected. The gas laser oscillator further desirably includes a stop unit for stopping the gas laser oscillator when the discharge load is judged as abnormal.

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First Claim