Securing device for a sputtering source
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United States of America Patent
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Issued Date -
May 14, 2009
app pub date -
Mar 13, 2007
filing date -
Mar 16, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A securing device for a sputtering source in a sputtering space includes a current transmitting means (2, 10, 13, 15, 16, 17, 18) of electrically and thermally conductive material for the conducting of a current to the sputtering source and also a screening means (1, 4, 5, 6, 12) for the screening of the current transmitting means from the sputtering space, so that the current transmitting means can be electrically insulated from the sputtering space, characterised in that temperature resistant means (1, 5) are provided to guarantee a temperature resistance and a resistance to electrical discharges of the securing device, in particular at temperatures up to 1150.degree. C.
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