Importance

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Abstract

A substrate attaching apparatus and method are provided. The substrate attaching apparatus may include an upper chamber, a lower chamber, an upper chuck, a lower chuck, a position controller, and a discharging device. The lower chamber may adjoin the upper chamber to define an attaching space therewith. The upper chuck may be provided at a lower portion of the upper chamber so as to mount a first substrate thereon. The lower chuck may be recessed into an upper surface of the lower chamber and/or may be integrally formed with the lower chamber so as to mount a second substrate thereon. The position controller may be provided above the upper chamber to control a position of the first substrate. The discharging device may be provided above the upper chamber or below the lower chamber to apply vacuum pressure to the attaching space.

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First Claim