MULTI-LINE SUBSTRATE TREATING APPARATUS
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United States of America Patent
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Issued Date -
Jun 4, 2009
app pub date -
Nov 26, 2008
filing date -
Nov 30, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate treating apparatus includes substrate treatment lines arranged one over another, each for treating substrates while transporting the substrates substantially horizontally. The apparatus further includes an interface section for transporting the substrates between the substrate treatment lines and an exposing machine having a plurality of exposing stages, the exposing machine being provided separately from the apparatus, and a controller for controlling transport of the substrates in the interface section to cause all the substrates similarly treated in each of the substrate treatment lines to be exposed on one of the exposing stages. This apparatus can uniform the quality of treatment among a plurality of substrates receiving the same type of treatment in the same substrate treating line.
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