MULTI-LAYER MIRROR FOR RADIATION IN THE SOFT X-RAY AND XUV WAVELENGTH RANGE
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United States of America Patent
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Issued Date -
Jun 4, 2009
app pub date -
Dec 15, 2005
filing date -
Dec 21, 2004
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Abandoned
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Abstract
Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.
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