FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE

United States of America Patent

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Issued Date
Jun 11, 2009
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Dec 6, 2007
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Dec 6, 2007

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Abstract

A method for fabricating a micro-electro-mechanical system (MEMS) device. The method comprises fabricating a MEMS part on a substrate, and detaching the MEMS part from the substrate. After detaching the MEMS part from the substrate, attaching the MEMS part to an application platform.

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WINMEMS TECHNOLOGIES HOLDINGS CO LTD	4F NO 1 SEC 1 DUNHUA S ROAD SONGSHAM DISTRICT TAIPEI CITY 10557

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Inventor Name	Address	# of filed Patents	Total Citations
Hsu, Tseng-Yang	San Marino , US	11	382
Lai, Chih-Hsiang	Taipei City , TW	4	9

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FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11951772

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11951772

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