Planarizing probe card
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United States of America Patent
Stats
-
Sep 7, 2010
Grant Date -
Jun 11, 2009
app pub date -
Dec 10, 2007
filing date -
Dec 10, 2007
priority date (Note) -
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Abstract
A novel planarizing probe card for testing a semiconductor device is presented. The probe card is adapted to come into contact with a probe card mount that is in adjustable contact with the prober. The probe card includes a printed circuit board affixed to a stiffener and a probe head that is in electrical contact with the printed circuit board. The probe head also includes a plurality of probe contactor tips that define a first plane. The stiffener further contains at least two planarizing adjusters that comes into contact with the probe card mount. The adjusters may be actuated to alter the position of first plane. A surface of the semiconductor device under test may define a second plane, and the adjusters may be adjusted to position the first plane to be substantially parallel to the second plane.
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