Scanning system for a probe storage device
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United States of America Patent
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Sep 7, 2010
Issued Date -
N/A
app pub date -
Dec 13, 2007
filing date -
Dec 13, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A probe storage device includes a scanner chip body having at least a mechanical ground portion provided with first and second opposing surfaces and a scan table suspension portion. A scan table including a top surface and a back surface is moveably mounted to the scan table suspension portion. A probe array chip is fixedly mounted to the first surface of the mechanical ground portion. A first plate is also fixedly mounted to the first surface of the mechanical ground portion. A second plate, having a main body portion including first and second opposing surfaces, is fixedly mounted to the second surface of the mechanical ground portion. A desiccant layer is positioned upon one of the first surface of the second plate, the back surface of the scan table and one of the first and second surfaces of the mechanical ground portion.
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