Polishing Composition and Polishing Method Using The Same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

12371840

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A polishing composition includes an abrasive, at least one compound of azoles and derivatives thereof, and water. The polishing composition is used in applications for polishing surfaces of semiconductor substrates in a suitable manner.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDKIYOSU-SHI AICHI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sakamoto, Kenji Gifu-shi , JP 99 1211

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation