SUBSTRATE TREATING APPARATUS WITH SUBSTRATE REORDERING
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United States of America Patent
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Issued Date -
Jul 2, 2009
app pub date -
Dec 23, 2008
filing date -
Dec 28, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A treating section has substrate treatment lines arranged one over the other for treating substrates while transporting the substrates substantially horizontally. An IF section transports the substrates fed from each substrate treatment line to an exposing machine provided separately from this apparatus. The substrates are transported to the exposing machine in the order in which the substrates are loaded into the treating section. The throughput of this apparatus can be improved greatly, without increasing the footprint, since the substrate treatment lines are arranged one over the other. Each substrate can be controlled easily since the order of the substrates transported to the exposing machine is in agreement with the order of the substrates loaded into the treating section.
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