Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates
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United States of America Patent
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Mar 29, 2016
Grant Date -
Jul 2, 2009
app pub date -
Dec 23, 2008
filing date -
Dec 28, 2007
priority date (Note) -
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Abstract
A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.
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