AVOIDING ELECTRICAL SHORTS IN PACKAGING
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United States of America Patent
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N/A
Issued Date -
Jul 2, 2009
app pub date -
Dec 3, 2008
filing date -
Dec 3, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A plasma clean tool that includes a cleaning chamber for cleaning an article by plasma cleaning and a charge shield for surrounding an article to be cleaned is presented. The charge shield prevents charged components of plasma from passing therethrough to charge the article during plasma cleaning of the article.
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