MEMORY CELL WITH PLANARIZED CARBON NANOTUBE LAYER AND METHODS OF FORMING THE SAME

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United States of America Patent

APP PUB NO 20090166610A1
SERIAL NO

11968159

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Abstract

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In some aspects, a method of fabricating a memory cell is provided that includes (1) fabricating a first conductor above a substrate; (2) fabricating a carbon nano-tube (CNT) material above the first conductor; (3) depositing a dielectric material onto a top surface of the CNT material; (4) planarizing the dielectric material to expose at least a portion of the CNT material; (5) fabricating a diode above the first conductor; and (6) fabricating a second conductor above the CNT material and the diode. Numerous other aspects are provided.

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Patent Owner(s)

Patent OwnerAddress
SANDISK TECHNOLOGIES LLC5080 SPECTRUM DRIVE SUITE 1050W ADDISON TX 75001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Mark Santa Clara , US 69 1224
Herner, Brad San Jose , US 16 1480
Schricker, April Fremont , US 23 849
Tanaka, Yoichiro Santa Clara , US 73 1731

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