Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Jul 9, 2009
app pub date -
Jan 3, 2009
filing date -
Jan 3, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a container door for access into an inner region of the housing assembly. The housing assembly includes a support structure defined along sidewalls of the housing assembly. The support structure has a plurality of edge support constraints protruding into the inner region of the housing assembly. The plurality of edge support constraints support opposing edge regions of the at least one substrate so as to cause the at least one substrate to deflect around an axis.
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