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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
OERLIKON LEYBOLD VACUUM GMBH	50968 KÖLN
OTTO FUCHS KG	58540 MEINERZHAGEN

International Classification(s)

• F04D:NON-POSITIVE-DISPLACEMENT PUMPS
• C22C:ALLOYS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Etschenberg, Lars	Siegburg , DE	3	2
Fischer, Gernot	Meinerzhagen , DE	7	36
Froitzheim, Michael	Dormagen , DE	9	29
Hölzer, Rainer	Hürth , DE	5	9
Roth, Ishan	Troisdorf , DE	2	2
Sauer, Dieter	Meinerzhagen , DE	14	80
Terlinde, Gregor	Meinerzhagen , DE	8	39

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2009/0180,890

ROTORS OR STATORS OF A TURBOMOLECULAR PUMP

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