AIR VENTILATION SYSTEM
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United States of America Patent
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N/A
Issued Date -
Jul 23, 2009
app pub date -
Jan 22, 2008
filing date -
Jan 22, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention is directed at an air ventilation system for use with semiconductor manufacturing equipment. Specifically, the ventilation system of the present invention adjusts vents or outlets located on an enclosure used for semiconductor manufacturing between a restricted state and an open state. When the vents and/or outlets are in an open state, a high flow rate through the enclosure is able to properly scavenge toxic and volatile gasses to safely remove them. When the vents and/or outlets are in a restricted state, the flow rate of gases therethrough is substantially or fully restricted. Upon the sensing of a condition (or the lack thereof) or the manual operation of an operator, the vents and/or outlets are selectively adjusted between the restricted and open states.
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