Importance

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Abstract

To enable to freely interchange a front end shape of a work in accordance with an object of, for example, removing a dust or the like, in addition thereto, even in a case of contaminating a work, to be able to easily deal therewith, and to be able to recognize a defect even when, for example, operated by an operator of a beginner without being governed by a technique of the operator, a tweezers constituted by two arms having probes arranged opposedly to a sample integrated to a scanning probe microscope and constituting an object of observation or working respectively at front ends thereof, and a plurality of kinds of interchanging works one of the plurality of kinds of which is selectively grasped by the tweezers are provided. As the interchanging works, there are an observing stylus work, a work for a contact hole, a corner moving work, a cutting work, a spatula shape work.

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First Claim