Methods for characterizing the behavior of microelectromechanical system devices
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United States of America Patent
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Mar 12, 2013
Grant Date -
Aug 13, 2009
app pub date -
Sep 30, 2008
filing date -
Feb 11, 2008
priority date (Note) -
Expired
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Abstract
Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.
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