Calibration Method For Edge Inspection Apparatus
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United States of America Patent
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Issued Date -
Aug 13, 2009
app pub date -
Jun 14, 2007
filing date -
Jun 27, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A calibration method for an edge inspection apparatus having: a light emitting portion which irradiates light onto an edge of a substrate being inspected; and a detection portion which detects optical characteristics of the light reflected by the edge to detect the defect occurring in the edge based on the optical characteristics, wherein the calibration method including: a pseudo-defect formation step of forming a plurality of pseudo-defects on an edge of a substrate for calibration along a circumferential direction thereof, in which at least one of a position in the thickness direction of the substrate, the shape and the size is set so as to be different between the pseudo-defects; a detection step of irradiating the inspection light onto the respective pseudo-defects, and detecting the optical characteristics of the reflection light by the detection portion; and an adjustment step of calibrating the edge inspection apparatus based on the optical characteristics.
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