Carrier for holding an object to be polished
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United States of America Patent
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app pub date -
Apr 14, 2009
filing date -
Mar 9, 2004
priority date (Note) -
Abandoned
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Abstract
The present invention provides a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. The carrier for holding a workpiece according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. The method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD.
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