Importance

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Abstract

An apparatus for gas distribution includes a top dome-cover, a first gas distribution plate and a bottom plate bonded each other to deliver different gases onto substrates supporting by a susceptor. The first gas distribution plate is provided with a plurality of first island protrusions formed by intersecting a plurality of first channels and each first island protrusions has a bypass through hole so that different gases can be individually delivered via independent gas pathways formed by those through holes or those channels to prevent those different gases premix before processing on those substrates. Additionally, a fluid distribution plate disposed between the first gas distribution plate and the bottom plate may be adapted for heat dissipation.

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First Claim