Electronic device
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United States of America Patent
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Jun 19, 2012
Grant Date -
Aug 27, 2009
app pub date -
Oct 24, 2005
filing date -
Oct 27, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.
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