Plasma-Assisted Processing in a Manufacturing Line
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United States of America Patent
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Issued Date -
Aug 27, 2009
app pub date -
Mar 17, 2006
filing date -
Mar 18, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. The manufacturing line can include a plurality of microwave cavities, each of the microwave cavities igniting and sustaining a microwave plasma. Work pieces can be shuttled between the plurality of microwave cavities on a conveyance system that controls the positioning of each of the work pieces.
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