Support structures for electromechanical systems and methods of fabricating the same
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United States of America Patent
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Dec 20, 2011
Grant Date -
Aug 27, 2009
app pub date -
May 5, 2009
filing date -
Sep 27, 2004
priority date (Note) -
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Abstract
A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator elements have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.
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