REVERSIBLE PHOTO BLEACHABLE MATERIALS BASED ON NANO SIZED SEMICONDUCTOR PARTICLES AND THEIR OPTICAL APPLICATIONS
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United States of America Patent
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Mar 16, 2009
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Dec 9, 2002
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Abstract
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.
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