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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
NIPPON CHEMICAL INDUSTRIAL CO LTD	TOKYO 136-8515
SPEEDFAM CO LTD	JAPAN'S KANAGAWA COUNTY LAI LAI CITY FOUR 2 37 AIKAWA-SHI KANAGAWA

International Classification(s)

• C09K:MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED ....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Izumi, Masahiro	Koto-ku , JP	55	679
Maejima, Kuniaki	Koto-ku , JP	9	76
Miyabe, Shinsuke	Koto-ku , JP	17	60
Nakajo, Masaru	Koto-ku , JP	15	74
Tanaka, Hiroaki	Ayase-shi , JP	532	5487

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2009/0223,136

Polishing compound for semiconductor wafer polishing and polishing method

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