POLISHING SLURRIES FOR CHEMICAL-MECHANICAL POLISHING

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United States of America Patent

SERIAL NO

12469193

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Abstract

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in a solution of deionized water and an oxidizing agent.

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Patent Owner(s)

Patent OwnerAddress
CYPRUS AMAX MINERALS COMPANY333 NORTH CENTRAL AVENUE PHOENIX AS 85004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babu, Suryadevara Vijayakumar Potsdam , US 2 7
Hedge, Sharath Potsdam , US 2 7
Hong, Youngki Potsdam , US 43 152
Jha, Sunil Chandra Oro Valley , US 17 146
Nimmala, Sreehari Oro Valley , US 4 20
Patri, Udaya B Potsdam , US 6 40

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